This is the STWHR4156 series of waterproof 4-axis cylindrical coordinate robots.
It can transport wafers in environments where water is present or in wet conditions. It is capable of transporting wafers in environments where people cannot enter and touch the wafers due to chemicals. It is suitable for transporting wafers in acidic and alkaline mist atmospheres during the LSI manufacturing process. The arm section ensures corrosion resistance with a Teflon coating. The arm joint section uses a V-seal for waterproofing. The joints of the components are sealed with a Viton packing. The Z-axis section can also accommodate a bellows for waterproofing. The adoption of a twin arm reduces wafer exchange time. It is equipped with an operation monitor. Control method: RS232C and parallel photo I/O. All axes use two-phase stepping motors. The S-curve acceleration and deceleration control allows for high-speed and high-precision wafer transport. Wafer holding methods include vacuum suction, drop-in, and edge grip chucks. It can accommodate optimal chucks tailored to the transported items and equipment layout.
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basic information
Robot Specifications Robot Model: STWHR4156-200-PM Transported Object: Up to 300mm wafer Wafer Holding Method: Vacuum suction using a chuck Mechanical Structure Type: Cylindrical coordinate type Control Axes: 4 axes Motor Type: 2-phase pulse motor Operating Range: Arm 3rd joint center Swing Angle (θ axis): 340 degrees Vertical Stroke (Z axis): 200mm Transport Speed (Average): Arm (R axis): 300mm/sec Swing Angle (θ axis): 100 degrees/sec Vertical Stroke (Z axis): 100mm/sec Transport Speed (Maximum): Arm (R axis): 600mm/sec Swing Angle (θ axis): 130 degrees/sec Vertical Stroke (Z axis): 140mm/sec Resolution: Arm (R axis): Less than 107µm Swing Angle (θ axis): 0.0107 degrees Vertical Stroke (Z axis): Less than 12.5µm Transport Level: 569mm (from the base mounting surface to the upper chuck transport line) Repeatability: Within ±0.2mm Utility: Current Voltage: DC24V 10A Vacuum: -53kPa or more (when using suction chuck)
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Applications/Examples of results
Semiconductor manufacturing equipment, etc.
Company information
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