It is suitable for wafer transport and enables high-speed transport using all-axis AC servos.
The MTCR4000 series, compatible with 300mm for super clean rooms, is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. It enables high-speed transport with full-axis AC servos, offering superior cost performance compared to conventional MTHR models. You can choose between base type and flange type according to your equipment layout. It is possible to accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.
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basic information
**Features** - Arm variation: 160mm - Z-axis variation: 300mm - Load capacity: 4kgf or less based on the third joint of the arm - Reduced wafer exchange time due to the adoption of twin arms - Base type and flange type can be selected according to the device layout - Equipped with operation monitor - Control method: RS232C and parallel photo I/O - All axes use AC servo motors - High-speed, high-precision wafer transport with S-curve acceleration and deceleration control - Wafer holding: vacuum suction, drop-in, edge grip chuck - Chuck materials can be various, including CFRP, aluminum, ceramics, etc. - Can accommodate optimal chucks tailored to the transported items and device layout For more details, please contact us or refer to the catalog.
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