Compared to STVHR, the portable weight has doubled, resulting in excellent cost performance.
The vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series can be used for transporting wafers within a vacuum chamber. Compared to the STVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the STVHR for installation, allowing for a smooth transition during replacement. The adoption of a twin-arm design has reduced wafer exchange time. For more details, please contact us or refer to the catalog.
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【Features】 ○ Arm variations: 160mm, 190mm, 260mm ○ Z-axis variation: 50mm ○ Load capacity: 2kgf or less at the third joint (arm length 160mm, 260mm) 3kgf or less at the third joint (arm length 190mm) ○ Magnetic fluid seals equipped at the arm joints ○ Vacuum seal: uses magnetic fluid seals and bellows ○ Cleanroom compatible: equipped with a 5μm mesh filter for arm exhaust ○ Twin-arm design reduces wafer exchange time ○ Operating monitor equipped ○ Control method: RS232C and parallel photo I/O ○ All axes use AC servo motors ○ S-curve acceleration and deceleration control enables high-speed, high-precision wafer transport ○ 2-phase pulse motor specification also available ○ Chuck materials can accommodate various options such as CFRP, aluminum, ceramics, etc. ○ Wafer holding: drop-in, edge grip chuck ○ Can accommodate optimal chucks tailored to the transported items and equipment layout ● For more details, please contact us or refer to the catalog.
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