Compared to STVHR, the portable weight has doubled, resulting in excellent cost performance.
The vacuum-compatible 4-axis cylindrical coordinate clean robot STVCR4000 series can be used for transporting wafers within a vacuum chamber. Compared to the STVHR, it has double the payload capacity and offers excellent cost performance. Additionally, it is compatible with the STVHR for installation, allowing for a smooth transition during replacement. The adoption of a twin-arm design has reduced wafer exchange time. For more details, please contact us or refer to the catalog.
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basic information
【Features】 ○ Arm variations: 160mm, 190mm, 260mm ○ Z-axis variation: 50mm ○ Load capacity: 2kgf or less at the third joint (arm length 160mm, 260mm) 3kgf or less at the third joint (arm length 190mm) ○ Magnetic fluid seals equipped at the arm joints ○ Vacuum seal: uses magnetic fluid seals and bellows ○ Cleanroom compatible: equipped with a 5μm mesh filter for arm exhaust ○ Twin-arm design reduces wafer exchange time ○ Operating monitor equipped ○ Control method: RS232C and parallel photo I/O ○ All axes use AC servo motors ○ S-curve acceleration and deceleration control enables high-speed, high-precision wafer transport ○ 2-phase pulse motor specification also available ○ Chuck materials can accommodate various options such as CFRP, aluminum, ceramics, etc. ○ Wafer holding: drop-in, edge grip chuck ○ Can accommodate optimal chucks tailored to the transported items and equipment layout ● For more details, please contact us or refer to the catalog.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
