Supports transportation requiring wafer positioning in semiconductor manufacturing equipment, such as inspection devices.
The optical aligner SAL38C2/SAL3361 series is designed to support the positioning of wafers in semiconductor manufacturing equipment and inspection devices that require precise transport. It centers silicon wafers and positions the orientation flat and notch quickly and accurately. It is equipped with a 0.1μm filter on the spindle side, and the control method is RS232C and parallel photo I/O. It achieves approximately 50% reduction in footprint compared to the conventional models SAL46C6 and SAL4484. For more details, please contact us or refer to the catalog.
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【Features】 ○ Supports transportation requiring wafer positioning in semiconductor manufacturing equipment and inspection devices ○ High-speed, high-precision centering and positioning of silicon wafers with orientation flats and notches ○ Cleanroom compatible: Equipped with a 0.1μm filter on the spindle side ○ Control method: RS232C and parallel photo I/O ○ Achieves approximately 50% reduction in footprint compared to conventional models SAL46C6 and SAL4484 ● For more details, please contact us or refer to the catalog.
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