High-speed, high-precision positioning of silicon wafer centering and Orifla notch.
The SAL46C6 series optical aligner, compatible with 150mm to 300mm, is designed for positioning wafers in semiconductor manufacturing equipment and inspection devices. It achieves high-speed and high-precision centering of silicon wafers and positioning of the orientation flats and notches. The control method uses RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.
Inquire About This Product
basic information
【Specifications】 ○Transported Item: SEMI standard 150–300mm silicon wafer ○Positioning Time: Centering: 3 sec ○Positioning Accuracy →Centering: Within ±0.1mm →Orientation (Notch) Locate: Within ±0.1° ○Sensor: Visible light semiconductor laser sensor ○Size Switching: Switching via command control or communication ○Cleanliness: 0.1μm/cf Class 1 (during exhaust of drive part) ○Drive Method →Using 2-phase stepping motors, 4 axes →Built-in motor driver and controller ○Power/Vacuum: DC24V±10%, 3A/-53kPa or more ●For more details, please contact us or refer to the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or refer to the catalog.
catalog（1）
Download All Catalogs
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."