We have achieved a reduced footprint with small-diameter wafer compatibility.
The SAL2241 series aligner, compatible with 50mm to 100mm wafers, is designed for transporting wafers that require positioning within semiconductor manufacturing equipment and inspection devices. It achieves a compact footprint while accommodating small-diameter wafers. It centers small-diameter wafers and positions orifices and notches with high speed and precision. A 0.1μm filter is equipped on the spindle side. The control method is via RS232C and parallel photo I/O. For more details, please contact us or refer to the catalog.
Inquire About This Product
basic information
【Features】 ○ Supports transportation requiring wafer positioning in semiconductor manufacturing equipment and inspection devices. ○ Achieves a compact footprint for small-diameter wafers. ○ High-speed, high-precision positioning for centering and locating the orientation flat and notch of small-diameter wafers. ○ Cleanliness measures: Equipped with a 0.1μm filter on the spindle side. ○ Control method: RS232C and parallel photo I/O. 【Specifications】 ○ Transported items: 2-inch, 3-inch, 100mm silicon wafers. ○ Positioning time: Centering: 6 seconds. ○ Positioning accuracy: Centering: within ±0.3mm; Orientation flat location: within ±0.3 degrees. ○ Sensor: Limited reflection type fiber sensor. ○ Size switching: Switching via command control or communication. ○ Cleanliness: ISO Class 2 (during exhaust of the drive section). ○ Drive method: 2-axis using 2-phase stepping motors. → Motor driver and controller built-in. ○ Utilities: Power supply: DC24V 3A; Positive pressure: 0.15–0.5MPa; Vacuum: -70kPa or more. ● For more details, please contact us or refer to the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or refer to the catalog.
catalog（1）
Download All Catalogs
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."