A buffer function has been implemented in the Alaina, allowing for wafer replacement.
The sorter system complies with SEMI Standards (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600). It features a buffer function in the aligner, enabling wafer exchange and achieving high throughput. With the built-in ID reader, it is possible to read the wafer ID (front and back support is optional). For more details, please contact us or refer to the catalog.
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【Features】 ○ Complies with SEMI Standards → E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600 ○ Equipped with a buffer function for the aligner, allowing for wafer replacement ○ Achieves high throughput ○ Capable of reading wafer IDs with an ID reader → Front and back compatibility is optional 【Specifications】 ○ Target carrier: 300mm FOUP (25 wafers) compliant with SEMI E47.1.E62 ○ Target wafer: 300mm silicon wafer, thickness 775μm ○ Throughput: 300 wafers/hour ○ Cleanliness: ISO Class 2 ○ External dimensions: W1250×D2500×H1900 ○ Weight: 800kgf ○ Utilities → Power supply: AC200V±10% single phase 10A → Dry air: 0.5Mpa±10% → Vacuum: -53kPa or higher ● For more details, please contact us or refer to the catalog.
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