Equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR inside the device.
The 6-inch sorter system reduces the width direction to 50% of the inline type by arranging two cassettes in two tiers (a total of four). It is equipped with a multi-axis GCR and a glass-compatible aligner SAL3361GR. By incorporating the multi-axis GCR type, parallel arrangement of cassettes can be achieved solely by the robot. The glass-compatible aligner can position transparent, translucent, and silicone materials for centering and oleo-fluorolocation quickly and with high precision. For more details, please contact us or refer to the catalog.
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**Features** - Two cassettes arranged in two tiers (a total of four) → Width direction reduced to 50% of inline type - Equipped with multi-axis GCR and glass-compatible aligner SAL3361GR - Multi-axis GCR type installed → Parallel arrangement of cassettes possible with bots only - Glass-compatible aligner can position transparent, translucent, and silicon materials for centering and olifralocation quickly and accurately **Specifications** - Target carrier: Cassette for 150mm wafers - Target wafer: 150mm wafers (glass, sapphire, GaAs) - Throughput: 140 wafers/hour (excluding processing time on the equipment side) - Cleanliness: ISO Class 2 - External dimensions: W835×D940×H1815 - Weight: 350kgf - Utilities → Power supply: Single-phase AC200V±10% 15A → Vacuum: -53kPa or more ● For more details, please contact us or refer to the catalog.
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◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
