A buffer function has been implemented in the Alaina, allowing for wafer replacement.
The sorter system complies with SEMI Standards (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600). It features a buffer function in the aligner, enabling wafer exchange and achieving high throughput. With the built-in ID reader, it is possible to read the wafer ID (front and back support is optional). For more details, please contact us or refer to the catalog.
Inquire About This Product
basic information
【Features】 ○ Complies with SEMI Standards → E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600 ○ Equipped with a buffer function for the aligner, allowing for wafer replacement ○ Achieves high throughput ○ Capable of reading wafer IDs with an ID reader → Front and back compatibility is optional 【Specifications】 ○ Target carrier: 300mm FOUP (25 wafers) compliant with SEMI E47.1.E62 ○ Target wafer: 300mm silicon wafer, thickness 775μm ○ Throughput: 300 wafers/hour ○ Cleanliness: ISO Class 2 ○ External dimensions: W1250×D2500×H1900 ○ Weight: 800kgf ○ Utilities → Power supply: AC200V±10% single phase 10A → Dry air: 0.5Mpa±10% → Vacuum: -53kPa or higher ● For more details, please contact us or refer to the catalog.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
For more details, please contact us or refer to the catalog.
catalog（1）
Download All Catalogs
Company information
◆We value trust We believe that providing products that satisfy our customers is essential, but first and foremost, we want to establish and cherish trust with our "customers" and "business partners" as the foundation of our management. ◆Heart Recognizing that "heartfelt service cannot be born in a workplace where employees lack a sense of purpose and fulfillment," we aim to create a company where everyone is connected with care, even in a small organization. ◆Speed No matter how good a product is, if it doesn't meet the necessary timing, it is not a good product. ◆Skill With years of experience, accumulated data, and developed technology, we can create products that accurately understand needs. ◆Customer trust and satisfaction We are confident that with the integration of "heart" and "skill," we will ultimately provide satisfaction that makes our customers feel, "I am glad I adopted JEL products."
