Stage with built-in linear encoder that can be used in a vacuum with 1nm resolution.
This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. The operating range is 40mm, allowing positioning and movement with a single unit. It incorporates a self-developed linear scale, resulting in a slim and lightweight design, and offers high-precision repeat positioning performance through full closed-loop control, featuring characteristics comparable to those for atmospheric use.
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basic information
- Achieves a slim and lightweight design while incorporating a 5-phase stepping motor, coupling, ball screw, and linear scale. - High-precision repeat positioning is possible with full closed-loop control. - Table size: 80mm × 80mm - Table movement: 40mm - Compatible vacuum level: 10^-4 Pa - Load capacity: 49N - Minimum resolution: 1nm - Maximum movement speed: 2mm/sec - Compatible controller: FC-911 For more details, please refer to the catalog or contact us.
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Applications/Examples of results
X-ray utilization technology (such as focusing of synchrotron radiation) Semiconductor-related (such as stitching of drawing areas) It is used in various advanced research.
catalog（1）
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CAD data（1）
| Model number | overview | File |
|---|---|---|
| DWG-DXF_FS-1040UPX(V) | This is a complete set of drawings for the vacuum-compatible 1nm resolution stage FS-1040UPX(V). We have 2D formats available in "DXF" and "DWG". |
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.