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  6. Exhaust filter for MOCVD device VEECO K465i G2

Exhaust filter for MOCVD device VEECO K465i G2

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AIRYTECH

last updated:Oct 14, 2014

愛鋭精密科技(大連)有限公司(AIRY TECHNOLOGY CO., LTD.) 中国大連本社
愛鋭精密科技(大連)有限公司(AIRY TECHNOLOGY CO., LTD.) 中国大連本社
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MOCVD equipment VEECO K465i G2

Made in China, with proven results worldwide and a strong track record in Japan. Uses imported filtration materials from the United States, quality is guaranteed.

    CVD EquipmentOther semiconductor manufacturing equipment
K465iG2.png

Exhaust filter for MOCVD device VEECO K465i G2

K465iG2.png
K465iG2.png
  • Related Link - http://www.airytech.com/en/index.html

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basic information

The VEECO filter series products are designed specifically for exhaust filtration of VEECO MOCVD equipment, using high-temperature resistant non-woven fabric from the American RAND Corporation and Chinese SUS304. The non-woven material is directly imported from the United States and features high-temperature resistance, high pressure resistance, high precision, and excellent filtration efficiency. The K465i G2 series adopts a two-stage filtration process, making full use of the length of the filtration chamber. It uses glass fiber filter paper imported from the United States, with uniform gap sections, thick filter paper, good permeability, low differential pressure, and protective functions for the MOCVD equipment. It has excellent strength, high-temperature resistance, and corrosion resistance, making it ideal for the exhaust filtration environment of MOCVD. 1. Dimensions: Height: 322mm, Inner diameter: 233mm, Outer diameter: 359mm 2. O-ring: Inner diameter: 270mm, Outer diameter: 340mm. 3. Filtration precision: Coarse filtration 100um, Fine filtration 25um, Overall filtration efficiency 15um@98%. 4. Effective filtration area: Coarse filtration 3.456m2, Fine filtration 3.456m2, Total filtration area for one set 6.912m2 5. Applicable temperature: <400℃. 6. Packaging: 1 coarse filter + 1 fine filter Replacement cycle: 40 days

Price range

P2

Delivery Time

P4

Applications/Examples of results

MOCVD equipment for VEECO

Company information

愛鋭精密科技(大連)有限公司(AIRY

愛鋭精密科技(大連)有限公司(AIRY TECHNOLOGY CO., LTD.) 中国大連本社

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AIRY TECHNOLOGY CO., LTD. is located in Dalian, China, and targets the advanced technology markets in China, including electronic semiconductors, LEDs, organic EL, and biotechnology. While introducing and selling advanced technologies and products from Japan, South Korea, and the United States, we also sell high-quality, low-cost industrial raw materials and finished products made in China to industrially advanced countries such as Japan, South Korea, Russia, and the United States, adhering to strict quality standards.

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