Film-related products TELEMARK vacuum deposition components

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last updated：Oct 31, 2024

VISTA

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Leave vacuum deposition, such as electron guns for evaporation, to us.

VISTA Corporation offers a diverse lineup including TELEMARK-manufactured electron guns and quartz film thickness monitors. TELEMARK's electron guns come in a wide range of products, including ultra-high vacuum compatible types, general-purpose high vacuum types, single pocket, rotating, linear types, and crucible volumes ranging from 4cc to 1500cc, with maximum beam powers from 3kW to 15kW. Additionally, effectively removing moisture from deposition equipment is an essential challenge for vacuum deposition. The TELEMARK cryo trap TVP series effectively adsorbs and exhausts water vapor by circulating a refrigerant at -150°C through cryo coils installed in the vacuum chamber, significantly lowering the water vapor partial pressure and dramatically reducing exhaust time. 【Product Lineup】 ○ Electron Guns ○ Electron Gun Power Supplies and Accessories ○ Quartz Film Thickness Monitors / Thickness Controllers ○ Cryo Trap TVP Series ○ Ion Source Systems For more details, please contact us or download the catalog.

Related Link - https://vista-vac.com/products/electron-gun

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**Features** ○ Electron Gun → Ultra-high vacuum compatible, high vacuum general-purpose, single pocket, rotating type, linear type → Crucible volume from 4cc to 1500cc, maximum beam power from 3kW to 15kW ○ Electron Gun Power Supply and Accessories → A rich lineup of 10 models ranging from 3kW to 20kW → Standard equipped with a sweep power supply ○ Quartz Film Thickness Monitor / Film Thickness Controller → Deposition Controller Model 880 Capable of simultaneous measurement with 2 sensors as standard, expandable up to 8 sensors → Film Thickness/Rate Monitor Model 855 No control function, but economical for rate monitoring and film thickness monitoring applications ○ Cryo Trap TVP Series → Quick cooldown reduces cycle time → Small footprint, fast defrosting possible ○ Ion Source System → Saintech Series III Ion Source Lightweight and compact with significant freedom for installation on equipment Very low operating temperature (70-80℃) due to high-efficiency water cooling structure, resulting in minimal thermal damage to substrates and no parts that wear out due to heat, making it maintenance-free ● For more details, please contact us or download the catalog.