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  6. Parallel light exposure device

Parallel light exposure device

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HTE-510-EHC

last updated:Jun 12, 2023

イーエッチシー
イーエッチシー
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It is a compactly designed parallel light exposure device.

This device is a parallel light exposure system using a point light source of a super high-pressure mercury lamp and a collimation mirror method. The main components consist of a light source unit, an adsorption-type exposure table unit, and a mask unit. The exposure method allows for vacuum contact (hard contact) exposure. Upon request, a proximity method is also available. To manage exposure, it is equipped with an integrated light meter, making it easier to set the appropriate exposure amount. It is a compactly designed exposure device with a stand. For more details, please contact us or download the catalog.

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装置正面.JPG

Parallel light exposure device

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装置正面.JPG 試料セット2.JPG 平行度測定.JPG
  • Related Link - http://www.jehc.co.jp/
  • Special site - Product/service details - https://pr.mono.ipros.com/EHC/product/

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basic information

【Basic Specifications】 Work Dimensions: 150mm x 150mm, Thickness approximately 0.1 to 1.0mm Optical Performance: 1KW Ultra High Pressure Mercury Lamp (Air-cooled), Wavelength approximately 300 to 470nm (Main wavelengths 365, 405, 436nm) Ultraviolet Irradiance: Approximately 40mW/cm² initial value (@365nm), Illuminance distribution over 90% Beam Parallelism: Collimation half-angle ≦ 1.5°, Declination angle ≦ 1.0° Exposure Shutter: Open/close type using air-driven shutter Exposure Amount Management: Based on integrated light meter (Management wavelength 365nm), 20-channel memory Mask (Basic): Glass mask, □8 inches, Thickness 3.0mm or 5.0mm Exposure Table: Suction type table, front and back movable, built-in vacuum pump Upper Frame Type: Dedicated frame for glass mask or Mylar frame Utilities: Power supply 3-phase 200V 50/60Hz, Circuit breaker switch 30A, 10.5KVA Air pressure approximately 0.5Mpa Exhaust approximately 8m³/min External Dimensions: (W)800mm x (D)1470mm x (H)1915mm ● For more details, please contact us or download the catalog.

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イーエッチシー

イーエッチシー

Electronic Components and Semiconductors

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Since our founding in 1972, we have supported engineers and researchers involved in displays. We manufacture and sell various glass substrates and world-standard EHC cells both domestically and internationally, which are the core of our business. In recent years, there has been a growing demand for diverse metal deposition substrates and high-resolution patterned glass substrates. As peripheral equipment, we provide custom small LCD panel assembly systems, wet process equipment, and measurement and inspection devices for organic EL and solar cells, either as dedicated systems or including simple jigs and other components.

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