It is a deposition device for ultra-high-performance optical thin films with low particle specifications.
The ultra-high-performance optical film deposition device "Sapio 1300/1550" achieves high precision by incorporating a newly developed fiber-optic monitoring system and an 80-point monitor glass mechanism that enables stable temperature control, ensuring the desired characteristics are obtained. Thorough measures against outgassing allow for stable film quality and characteristics even when the chamber is contaminated. 【Features】 ○ High-efficiency exhaust system ○ Low particle specification (optional) ○ High-precision film thickness control system ○ High-output, large-area irradiation ion source For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Even in the continuous deposition of 20 batches with an IR cut filter, the increase in haze value (turbidity) is minimized. ○ By optimizing the exhaust and venting methods, implementing anti-contamination measures near the evaporation source, and tuning the electron gun, low particle generation has been achieved. ○ By equipping a high-output RF ion source specifically designed for Sapio, it is possible to achieve high quality across a wide range from multilayer optical filters to resin films. ○ A unique approach ensures reliable ignition performance of the neutralizer, enabling stable operation. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
Optical film ●For more details, please contact us or download the catalog.
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Company information
Showa Vacuum Co., Ltd. manufactures and sells vacuum technology application devices (vacuum equipment) such as vacuum deposition devices and sputtering devices, primarily focused on equipment that forms thin films on specific substrates in a vacuum.