All chemical solutions are optimally designed for fluid control in high-purity applications.
Malema's flow controllers are made entirely of Teflon for the wetted parts, designed for high-purity chemical solutions, and are used worldwide as standard components in various semiconductor manufacturing equipment, including control and monitoring products. Additionally, we offer Coriolis flow controllers specifically designed for the control of challenging liquids such as foaming chemicals and CMP slurries, which have previously been difficult to monitor and control.
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basic information
The PFA-made Coriolis flow controller can achieve high-precision control of foaming liquids and slurries that ultrasonic flow meters cannot measure. It allows for high-precision flow monitoring and control without being affected by changes in fluid viscosity, and there is no need for adjustments or settings based on the characteristics of the measured fluid. It can control liquids with gas content of up to 30%.
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Applications/Examples of results
Fluid control in semiconductor manufacturing equipment.
Line up（3）
| Model number | overview |
|---|---|
| LFC-7000 Series | |
| MFC-8100 Series | |
| CMFC-9000 Series |
Company information
We are a trading company that provides the sale of semiconductor manufacturing equipment, inspection equipment, and components for semiconductor manufacturing both domestically and internationally, as well as technical support and cost reduction in device manufacturing.