All chemicals are designed for optimal fluid control in high-purity applications.
The "Flow Controller" manufactured by Malema is made entirely of Teflon for contact parts, designed for high-purity chemical solutions. It is used worldwide as a standard component in various semiconductor manufacturing equipment, including control and monitoring products. Additionally, we offer Coriolis-type flow controllers specifically designed for controlling foaming chemical solutions and CMP slurries, which have previously been difficult to monitor and control. 【Features】 - High-precision control of foaming chemical solutions and slurries that cannot be achieved with ultrasonic flow meters - Capable of high-precision flow monitoring and control unaffected by changes in fluid viscosity - No adjustments or settings required based on the characteristics of the measured fluid - Capable of controlling liquids with gas content up to 30% *For more details, please contact us or download the catalog.
Inquire About This Product
basic information
【Lineup】 ■LFC-7000 Series ■MFC-8100 Series ■CMFC-9000 Series *For more details, please contact us or download the catalog.
Price range
Delivery Time
Applications/Examples of results
Fluid control in semiconductor manufacturing equipment *For more details, please contact us or download the catalog.
catalog（1）
Download All Catalogs
Company information
We are a trading company that provides the sale of semiconductor manufacturing equipment, inspection equipment, and components for semiconductor manufacturing both domestically and internationally, as well as technical support and cost reduction in device manufacturing.
![System [Flow Control Device] FCS Thermal Series](https://image.mono.ipros.com/public/product/image/def/1918023/IPROS8224750736014940201.jpg?w=280&h=280)
