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  1. Home
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  3. Control and Electrical Equipment
  4. Process Control Equipment
  5. Flow Control
  6. Flow controller

Flow controller

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MALEMA SENSORS Corporation

last updated:Apr 18, 2019

ファーストゲート 本社、大阪オフィス、笹目倉庫
ファーストゲート 本社、大阪オフィス、笹目倉庫
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All chemical solutions are optimally designed for fluid control in high-purity applications.

Malema's flow controllers are made entirely of Teflon for the wetted parts, designed for high-purity chemical solutions, and are used worldwide as standard components in various semiconductor manufacturing equipment, including control and monitoring products. Additionally, we offer Coriolis flow controllers specifically designed for the control of challenging liquids such as foaming chemicals and CMP slurries, which have previously been difficult to monitor and control.

    Flow Control
cmfc-5000-series-coriolis-flow-controllers.png

Flow controller

cmfc-5000-series-coriolis-flow-controllers.png
cmfc-5000-series-coriolis-flow-controllers.png
  • Related Link - http://www.fastgate.co.jp/Malema/index.html

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basic information

The PFA-made Coriolis flow controller can achieve high-precision control of foaming liquids and slurries that ultrasonic flow meters cannot measure. It allows for high-precision flow monitoring and control without being affected by changes in fluid viscosity, and there is no need for adjustments or settings based on the characteristics of the measured fluid. It can control liquids with gas content of up to 30%.

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Applications/Examples of results

Fluid control in semiconductor manufacturing equipment.

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Model number overview
LFC-7000 Series
MFC-8100 Series
CMFC-9000 Series

Company information

ファーストゲート

ファーストゲート 本社、大阪オフィス、笹目倉庫

Electronic Components and Semiconductors

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We are a trading company that provides the sale of semiconductor manufacturing equipment, inspection equipment, and components for semiconductor manufacturing both domestically and internationally, as well as technical support and cost reduction in device manufacturing.

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