This is a flow control device that adopts a thermal flow sensor control method.
Achieved further total cost reduction and shortened lead time with a digital interface-equipped mass flow controller. 【Features】 ○ High precision Flow accuracy of ±1% ○ High-performance sensor Adoption of low-temperature flow sensors, achieving optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve with reduced gas contact area and prevention of particle generation Adoption of high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.
Inquire About This Product
basic information
Achieved further total cost reduction and shortened lead time Mass flow controller equipped with a digital interface 【Features】 ○ High precision Flow accuracy of ±1% achieved ○ High-performance sensor Adoption of low-temperature flow sensors realizes optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve minimizes contact gas area and prevents particle generation Equipped with high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.
Price range
Delivery Time
Applications/Examples of results
Please refer to the detailed product catalog.
catalog（1）
Download All Catalogs
News about this product（5）
Company information
Fujikin is a cutting-edge manufacturer of ultra-precision fluid control systems, focusing on specialized valve equipment. Since its founding in 1930, the company has consistently challenged the limits and made it its corporate policy to exceed the ultimate in technology. We support people's lives and society across a wide range of fields, including semiconductors, hydrogen, pharmaceuticals, analysis and measurement, and space. We will continue to contribute to a sustainable society through comprehensive technology in fluid control equipment and systems. Please feel free to contact us if you have any inquiries.
