Capable of outputting multiple frequencies alternately, contributing to the densification of plasma and the development of new processes.
- Dual Frequency Power Supply 13.56MHz/27.12MHz 500W 1kW 2kW 5kW 27.12MHz/60MHz 3kW 2MHz/4MHz 1kW 2kW 400kHz/800kHz 500W - Triple Frequency Power Supply 27.12MHz/40.68MHz/54.24MHz 5kW 13.56MHz/27.12MHz/40.68MHz 500W 3kW 13.56MHz/27.12MHz/40.68MHz 20W - Quadruple Frequency Power Supply 13.56MHz/27.12MHz/40.68MHz/54.24MHz 1kW
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basic information
- Dual Frequency Power Supply 13.56MHz/27.12MHz 500W 1kW 2kW 5kW 27.12MHz/60MHz 3kW 2MHz/4MHz 1kW 2kW 400kHz/800kHz 500W - Triple Frequency Power Supply 27.12MHz/40.68MHz/54.24MHz 5kW 13.56MHz/27.12MHz/40.68MHz 500W 3kW 13.56MHz/27.12MHz/40.68MHz 20W - Quadruple Frequency Power Supply 13.56MHz/27.12MHz/40.68MHz/54.24MHz 1kW
Price range
P5
Delivery Time
Applications/Examples of results
We are adopted in a wide range of industries, including semiconductor manufacturing equipment.
Company information
RF Technologies has been involved in the development and design of high-frequency technologies since the time high-frequency power supplies began to be used in plasma processes, including "demonstration research," "material development," "surface modification," "semiconductor manufacturing," "FPD manufacturing," and "solar cells." Fortunately, we have had the opportunity for technical collaboration and exchange with academic researchers and major semiconductor manufacturing equipment manufacturers at the forefront of global technology. We have experienced many instances where the alignment of our technologies was essential to solving issues that overlap between areas that equipment manufacturers need to address and areas that power supply manufacturers need to resolve.
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