The exhaust chamber can achieve stable exhaust over a long period without using oil and without contact. 【ULVAC】
The CR series dry vacuum pumps are air-cooled, roots-type dry vacuum pumps. They do not use oil in the exhaust chamber, and the rotor and cylinder operate without contact, allowing for stable operation over long periods. No cooling water or nitrogen gas is required, contributing to reduced running costs. 【Product Lineup】 ○ CR16A ○ CR30A ○ CR60A ○ CR300A For more details, please contact us or download the catalog.
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basic information
【Features】 ○ The exhaust chamber allows for stable exhaust over long periods without contact or the use of oil. ○ No cooling water or nitrogen gas is required, contributing to reduced running costs. ○ Energy-saving, airtightness, and lightweight design achieved by incorporating a DC canned motor. ○ Water vapor exhaust is possible with the gas ballast mechanism. ○ Compact design with built-in silencer. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Vacuum exhaust of clean gases such as air and inert gases ○ Exhaust of water vapor for vacuum drying (gas ballast is required) ○ Vacuum equipment for sputtering, deposition, etc. ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.