Base unit for combining a mechanical booster pump and an oil rotary vacuum pump [ULVAC].
The UTM300B is a turbo molecular pump with a composite wing design that uses ceramic ball bearings. The integration of the controller and pump achieves space-saving. Its excellent high back pressure characteristics also enable the miniaturization of auxiliary pumps. 【Product Lineup】 ○ UTM300B (ISO flange type) ○ ISO100-K flange type ○ VG100 flange type ○ ICF152 flange type For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Free installation direction → There are no restrictions on the installation direction, allowing for greater design flexibility of the device. ○ Equipped with an onboard controller → The controller is mounted on the turbo body, which is effective for reducing wiring and downsizing the exhaust system. ○ High compression ratio and high back pressure → The high compression ratio allows for operation under high back pressure, enabling the downsizing of auxiliary pumps. ○ Three types of flanges available → You can choose from three types of intake flanges: VG100, ICF152, and ISO100-K. ○ Clean vacuum → Designed to minimize hydrocarbon backflow not only during operation but also when the pump is stopped. ○ Low noise → The noise level during no-load operation is below 50 dB, making it quiet (measured value for ISO-100K flange type). ○ Compliance standards → CE, NRTL compliant. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Main exhaust systems for analysis devices, research and development devices, experimental devices, etc. ○ Main exhaust systems for deposition devices, sputtering devices, etc. ○ Main exhaust systems for light gases such as H2 and He. ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.