This is a unit for directly applying electric current to titanium in a vacuum to sublime titanium. [ULVAC]
The Titanium Getter Pump (GGT-3, PGT Series) is a unit designed to directly electrify titanium alloy in a vacuum to sublime titanium. The sublimated titanium creates a large active metal surface on the surrounding walls, adsorbing and exhausting chemically active gases (H2, N2, O2, H2O, CO, CO2). The active metal surface of titanium does not have adsorption capability for inert gases (He, Ne, Ar, CH4, C2H6, and other organic gases), so it is used in combination with turbo molecular pumps and sputter ion pumps. 【Features】 ○ By selecting the adsorption area of the sublimated titanium according to the system design, a high exhaust speed can be achieved, improving the ultimate pressure performance. ○ The T-connection flange section features a knife-edge type metal seal (UFC), allowing for bakeout up to 250°C. ○ All constituent materials are treated with surface processing suitable for ultra-high vacuum. For more details, please contact us or download the catalog.
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basic information
【Features】 ○ Free design of exhaust speed improves achievable pressure → By selecting the adsorption area of sublimated titanium according to the system design, a large exhaust speed can be achieved, improving the performance of the achievable pressure. ○ Long-life filament → Titanium alloy filaments have a long lifespan of approximately 75 hours under rated continuous operation (30 seconds on / 60 seconds off) and about 25 hours under continuous operation. ○ Compatible with hard bake → The connection flange is equipped with a knife-edge type metal seal (UFC), allowing bake-out up to 250°C. ○ UHV compatible → All constituent materials are treated with surface processing suitable for ultra-high vacuum. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Exhaust systems for ultra-high vacuum ○ As a booster pump to improve the ultimate pressure of high vacuum pumps in various deposition devices (such as evaporation and sputtering) ○ As a booster pump to improve the ultimate pressure of high vacuum pumps in various experimental and research devices ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
