It is a mass flow controller that supports multi-range while being low-cost.
This is a mass flow controller that can be changed for various gases and ranges using the rotary switch located on the upper part of the MFC. 【Features】 ○ Short delivery time model ○ Equipped with high-speed, high-performance piezo actuator ○ Universal interface RS485 is available ○ Standard ultra-clean specification with metal seals and precision polished inner surfaces ○ Various gases and ranges can be changed using the rotary switch *For other functions and details, please download the catalog.
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basic information
○ Short delivery model ○ Equipped with high-speed, high-performance piezo actuators ○ General-purpose interface RS485 is available ○ Standard ultra-clean specification with metal seals and precision inner surface polishing ○ Various gases and ranges can be changed using a rotary switch
Price range
P2
Delivery Time
P3
Applications/Examples of results
It is widely supplied to semiconductor, liquid crystal, solar cell, and electronic component manufacturers, as well as their equipment manufacturers.
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Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.