It is a mass flow controller that can operate at low differential pressure such as SDS.
This is a mass flow controller that can control gas flow rates even at low pressure using proprietary technology. 【Features】 ○ Capable of controlling 10 SCCM (N2) at a differential pressure of 6 Torr due to its unique low-pressure loss structure ○ Suitable for applications such as AsH3 and PH3, and can control gases from liquids without heating ○ Compatible with the general-purpose interface RS485 ○ Standard ultra-clean specifications with metal seals and precision polished inner surfaces ○ Equipped with a high-speed, high-performance piezo actuator *For other functions and details, please download the catalog.
Inquire About This Product
basic information
- Capable of controlling 10 SCCM (N2) at a differential pressure of 6 Torr due to its unique low-pressure loss structure. - Usable for applications such as AsH3 and PH3, and capable of gas control for liquids without heating. - General-purpose interface RS485 is available. - Standard ultra-clean specifications with metal seals and precision polished inner surfaces. - Equipped with high-speed, high-performance piezo actuators.
Price range
P3
Delivery Time
P4
Applications/Examples of results
It is widely supplied to semiconductor, liquid crystal, solar cell, and electronic component manufacturers, as well as their equipment manufacturers.
catalog（1）
Download All Catalogs
Company information
Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.