Quartz oscillator film deposition controller with low-rate deposition control and high-precision film thickness control [ULVAC].
The CRTM-9100G is a quartz crystal oscillator-based film deposition controller developed with the concept of balancing low cost and high functionality. It incorporates all the technologies that Ulvac has cultivated over many years as a manufacturer of quartz crystal oscillator-based film deposition controllers, including continuous deposition of multilayer films, simultaneous deposition control of up to four components, and low rate control. It can be utilized for a long time in various deposition processes. 【Specifications】 ○Dimensions: W×D×H 480mm×350mm×149mm ○Weight: Approximately 8kg ○Utility: AC 85 – 230V 50/60Hz ○Power Consumption: 60W Max ○Operating Environment: Temperature: 5 – 40℃, Humidity: 5 – 95% RH (without condensation) For more details, please contact us or download the catalog.
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basic information
**Features** ○ High Resolution → Capable of handling deposition processes that require low rate control due to excellent film thickness and deposition rate resolution. ○ Quadruple Simultaneous Deposition Control → Simultaneous deposition control for up to four components is possible (when optional SS card is added). ○ MLC (Multi Layer Calculation) Function → A multilayer film calculation function that takes into account the deposition history on the quartz plate, enabling stable measurements even near the lifespan of the quartz plate. ○ TZC (Tooling, Z-Ratio Calculation) Function → Enables calculation of optimal tooling and Z-Ratio from actual measured film thickness values. ○ Synchronized Settings & Master-Slave → In simultaneous deposition, it allows synchronization of timing for each deposition process and maintains a constant component ratio. ○ Flexible Deposition Program → Allows free programming of deposition sequences of up to 30 phases by combining four commands for power and rate. ○ Program Storage to USB → Programs can be saved to a USB memory in addition to internal memory. ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Purpose】 ○ Control of film thickness and deposition rate during evaporation ● For more details, please contact us or download the catalog.
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Company information
ULVAC's corporate philosophy aims to contribute to the development of industry and science by comprehensively utilizing vacuum technology and its related technologies. ULVAC brings together its unique technologies cultivated through years of research and development and production technology reform to provide "ULVAC Solutions," which integrate equipment, materials, analytical evaluation, and services in a multifaceted manner for flat panel displays, electronic components, semiconductors, and general industrial equipment. Moving forward, we will continue to firmly embrace changes in the times and the needs of our customers, striving to be a top global manufacturer in all cutting-edge fields.
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