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  1. Home
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  3. Manufacturing and processing machinery
  4. Semiconductor Manufacturing Equipment
  5. Wafer processing/polishing equipment
  6. Technical Introduction: "Proposal for Wafer Precision Processing Process"

Technical Introduction: "Proposal for Wafer Precision Processing Process"

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last updated:Feb 01, 2016

スピードファム
スピードファム
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We will introduce grinding processing technology, flat grinding technology, and edge polishing, among others.

SpeedFam develops "equipment" and "consumable materials" from both hardware and software perspectives with innovative technology and know-how to meet various customer needs and propose optimal processing processes. Edge polishing, which performs mirror surface processing on wafer edges and notches, is an essential processing technology in the semiconductor manufacturing process. Mirror polishing of edges and notches prevents particle generation and significantly improves surface cleanliness in the device process. 【Technology Introduction】 ○ Polishing processing technology ○ Flat polishing technology ○ Edge polishing (end face polishing), etc. For more details, please contact us or download the catalog.

    Other processing machinesWafer processing/polishing equipment
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Technical Introduction: "Proposal for Wafer Precision Processing Process"

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  • Related Link - http://www.speedfam.com/jp/index.html

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【Content】 ○Si Wafer ○Consumable auxiliary materials ○IAG (Oxides, Sapphire, SiC, GaAs, Quartz, Ceramics, Metals, etc.) ○Polishing processing technology passed down for generations ○Actually important. Edge polishing (end face polishing) ○Consumable auxiliary materials and control software essential for the polishing process ○Thinner leads to higher functionality in planar polishing technology ○Creation of surfaces, etc. ●For more details, please contact us or download the catalog.

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Technical Introduction: "Proposal for Wafer Precision Processing Process"

Technical Introduction: "Proposal for Wafer Precision Processing Process"

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スピードファム

スピードファム

Industrial Machinery

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Speedfam Co., Ltd. is a company engaged in the manufacturing and sales of polishing equipment and more. In today's information society, where technological innovation is advancing at an accelerating pace, the flat surfaces required for various device substrates essential for cutting-edge products demand ultra-precision finishing at the nanometer level. The needs for flatness in this ultra-precision processing process have no limits, requiring the achievement of high-precision and stringent numerical targets in parallelism, dimensional control, and flatness, along with high productivity, improved yield, and maintenance of cleanliness. Speedfam responds to various customer needs by developing both "equipment" and "consumable materials" with innovative technology and know-how, and we propose optimal processing processes.

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