SRA：Spreading Resistance Analysis
SRA is a method that involves diagonally polishing the measurement sample, making contact with two probes on the polished surface, and measuring the spreading resistance. It is also referred to as SRP (Spreading Resistance Profiling). - It is possible to determine the conductivity type (p-type/n-type). - It allows for the evaluation of carrier concentration distribution in the depth direction. - It can analyze a wide range of carrier concentrations from approximately 1E12 to 2E20 /cm3. - It is capable of measuring patterned samples larger than approximately 20μm × 100μm. - By combining SRA with SIMS for evaluation, it is possible to assess the activation rate.
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basic information
Contact the two probes to the diagonally polished sample surface and measure the electrical resistance directly below. By comparing the measured values with those of calibration standard samples, the measured spreading resistance is converted to resistivity (Ω·cm). Furthermore, using Thurber's curve, which shows the relationship between resistivity and carrier concentration, the carrier concentration (/cm³) is calculated. Note that there is the following relationship between carrier concentration and resistivity.
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Applications/Examples of results
- Evaluation of activation rate after heat treatment of ion-implanted samples - Evaluation of diffusion layer and epitaxial layer in MOS devices - Evaluation of auto-doping in the epitaxial layer - Evaluation of carrier concentration distribution in IGBT and FWD
Detailed information
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Please consult with us first. ★ We will start by proposing an analysis plan ★ Meetings at your company are, of course, possible. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!
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We will hold a visiting seminar. ★ We offer free seminars with engineers tailored to our customers' needs ★ We will introduce analytical techniques and explain analytical data according to your requests. ◆ Example seminar content - A broad explanation of MST analytical methods - A detailed explanation of specific analytical methods from the principles - Explanation of the analytical data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!