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  6. [OBIRCH] Light Beam Heating Resistance Variation Method

[OBIRCH] Light Beam Heating Resistance Variation Method

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last updated:Mar 12, 2025

一般財団法人材料科学技術振興財団 MST
一般財団法人材料科学技術振興財団 MST
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OBIRCH is a method that utilizes the change in resistance caused by the heat generated at defect locations when light is applied, to identify abnormal areas.

OBIRCH is a method that utilizes the change in resistance caused by the heat generated at defect locations when light is applied, allowing for the identification of abnormal areas. - It can identify the locations of voids and deposits within wiring and vias. - It can identify abnormal contact resistance. - It can identify short circuits in wiring. - It visualizes the DC current path. - It is capable of detecting micro-leaks in gate oxide films.

    Contract AnalysisContract measurementContract Inspection
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[OBIRCH] Light Beam Heating Resistance Variation Method

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A0036.jpg 打ち合わせ.jpg セミナー.jpg
  • Related Link - https://www.mst.or.jp/method/tabid/162/Default.asp…
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basic information

1. The laser scans the observation area. The wiring section irradiated by the laser experiences a temperature rise, causing a change in resistance. 2. The current value (or voltage value) is read in synchronization with the laser scan. 3. Defects such as voids and precipitates have different TCRs compared to the normal wiring section, resulting in different resistance change amounts, which are detected as unique current values (or voltage values).

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Applications/Examples of results

- Si devices (transistors, MOSFETs, IGBTs, CMOS sensors) - SiC power devices (Schottky barrier diodes, MOSFETs, etc.) - GaN light-emitting elements and GaN devices (LDs, LEDs, HEMTs, etc.) - MEMS (pressure sensors, accelerometers)

Detailed information

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    Please consult with us first. ★ We will start with a proposal for an analysis plan ★ Meetings at your company are, of course, possible. We will carefully explain the analysis results and leave no questions unanswered. Please contact us at 03-3749-2525 or info@mst.or.jp!

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    We will hold a visiting seminar. ★ We offer free seminars with engineers tailored to our customers' needs ★ Depending on your requests, we will introduce analysis techniques and explain analysis data. ◆ Example seminar content - A broad explanation of MST analysis methods - A detailed explanation of specific analysis methods from the principles - An explanation of the analysis data requested by the customer Please contact us at 03-3749-2525 or info@mst.or.jp!

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一般財団法人材料科学技術振興財団 MST

一般財団法人材料科学技術振興財団 MST

Testing, Analysis and Measurement

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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