It is a high-efficiency ozone removal device that can be used under vacuum conditions.
This is a high-efficiency ozone decomposer manufactured by PARAM, designed for use under vacuum conditions. By developing materials with several times higher decomposition efficiency compared to conventional products, it boasts a very high processing capacity and is an ozone decomposer that generates no dust.
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basic information
【Features】 ○ Can be used under vacuum. ○ Decomposes ozone without generating dust. ○ Prevents corrosion of the vacuum pump by installing it before the vacuum pump. 【Specifications】 Model: OZ-1000 Inlet ozone concentration: 15% or less Outlet ozone concentration: 0.1 ppm or less Maximum processing flow rate: 5 sccm or less Conductance: 100 L/min or more * For details, please contact us. * If you have any other specifications you would like, please contact us.
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Applications/Examples of results
Electronic components, semiconductors, vacuum equipment, research and development.
Company information
Matsubo provides services in two business areas: [Industrial Machinery & Information] and [Powder Technology], supported by a [Technical Center] backup system. Breaking away from the confines of a specialized machinery trading company, we have established a comprehensive service system to ensure our customers can use our products with confidence, ranging from consulting prior to implementation, engineering related to installation and localization, to maintenance and proposals for improvements and modifications after installation.