Evaluation of the activation rate of the Dopant is possible.
SRA (Spreading Resistance Analysis) is a method that involves polishing a sample at an angle, making contact with two probes on the polished surface, and measuring the spreading resistance (Figure 1). By evaluating the carrier concentration distribution, it is possible to gain insights into the activation status of dopants. As an example, we present a case of SRA conducted on the central and outer regions of a diode chip surface after package opening (Figure 2).
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Analysis of power devices.
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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!