[Analysis Case] Evaluation of Foreign Substances on the Surface of 300mm Wafers
The coordinate linkage function with the foreign object inspection device allows for the evaluation of specific foreign objects.
It is possible to identify the components of foreign substances confirmed by the foreign substance inspection device using a TOF-SIMS installed in a clean room. After evaluating the foreign substances following CMP cleaning, copper and hydrocarbon components were detected from the substances of interest. A wide distribution of the same components was observed around the foreign substances. This suggests that the foreign substance is more likely to be cleaning residue resembling a watermark rather than a particle.
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Applications/Examples of results
Analysis of LSI and memory.
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Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!