UPS: Ultraviolet Photoelectron Spectroscopy
In semiconductors, it is possible to determine the ionization potential from the valence band maximum (VBM) and the rising position on the high binding energy side (Ek(min)). Measurements are conducted after Ar ion sputter cleaning to remove surface organic contamination. ■ Determination of the valence band maximum (VBM) The spectrum near the valence band edge is extrapolated linearly to find the intersection with the background. ■ Calculation of the ionization potential Ionization potential (I.P.) = hν - W hν: Energy of the incident ultraviolet light (He I line 21.22 eV) W: Energy width of the spectrum (Ek(min) - VBM)
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Applications/Examples of results
Analysis of LSI and memory.
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