Analysis of stains and cleaning residues that are not visible under an optical microscope is possible using TOF-SIMS.
In general, to remove dirt, a cotton swab may be dipped in ethanol and used for wiping. When the surface of a Si wafer was wiped with a cotton swab dipped in ethanol, an analysis was conducted using TOF-SIMS to determine what was distributed on the surface. The Si wafer wiped with the cotton swab showed stains that were not visible under an optical microscope, and it was found that these were due to the cotton swab. TOF-SIMS is effective for analyzing stains that are not visible under an optical microscope and for cleaning residues.
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For detailed data, please refer to the catalog.
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Applications/Examples of results
Analysis of LSI, memory, and electronic components.
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Download All Catalogs![[Analysis Case] Residue Analysis of Cotton Swab with Ethanol_C0201](https://image.mono.ipros.com/public/catalog/image/01/a6c/335670/IPROS1420774041226469486.jpg?w=120&h=170)
Company information
MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!