For raising and lowering substrates and transporting wafers! Irie Koken's bellows-type linear introducer.
The "Bellows Type Linear Introducer" is a type of introducer that drives in a linear direction, equipped with a high-performance welded bellows, enabling long strokes. It is used for applications such as raising and lowering substrates and transporting wafers. We also offer automatic versions, so please use them according to your needs. 【Features】 - Equipped with a welded bellows manufactured by Irie Koken, with standardized strokes from 30 to 200 mm. - The use of welded bellows in the drive unit seal allows for operation in ultra-high vacuum environments. - Designed to be extremely simple with a focus on functionality, making it compact and lightweight. - Designed to withstand baking temperatures of up to 250°C. *For more details, please refer to the catalog or feel free to contact us.
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【Lineup】 ■ILD-34M ■ILD-70M ■ILD-114M *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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Irie Koken of Vacuum Bellows "The master of expansion and contraction at a higher level of airtightness"