Introduction machine "Compact Rotating Introduction Machine (IRC)"

Compact type rotation introducer! For raising and lowering the substrate stage and transporting wafers!

The "Compact Rotary Feedthrough (IRC)" is a unit that incorporates a high-performance welded bellows, designed to isolate high vacuum and transmit rotational motion. Since it uses metal welded bellows for vacuum and atmospheric isolation, it can be used in ultra-high vacuum areas. In addition to this compact rotary feedthrough, which has a rotational positioning accuracy (without load) of 2° ± 0.5°, we also offer a high-precision rotary feedthrough with an accuracy of 0.5°. 【Features】 ■ Incorporates Irie Koken's welded bellows and standardizes connection flanges CF34 and CF70 ■ By using welded bellows for the drive unit seal, it can be used in high vacuum areas ■ Extremely simple design focused on functionality, making it compact and lightweight ■ Equipped with a rotation locking mechanism ■ Aperture can be set arbitrarily *For more details, please refer to the catalog or feel free to contact us.

Other Machine PartsVacuum Equipment