Generates vacuum ultraviolet light with a wavelength higher in energy than conventional mercury lamps!
The excimer irradiation device from Quark Technology Co., Ltd. generates excited oxygen atoms necessary for organic cleaning and surface modification using a high photon energy vacuum ultraviolet light source from excimer lamps. It is utilized in various devices, including semiconductor manufacturing equipment and film surface modification systems. It has good energy conversion efficiency with quasi-monochromatic light, and relatively little unwanted visible and infrared light compared to other discharge lamps, which prevents thermal damage to the workpiece. Additionally, it can instantaneously turn on and off without damaging the excimer lamp. Moreover, high-efficiency cleaning allows for irradiation during conveyor transport. We also offer flat types of excimer irradiation devices with different features, so please choose according to your application. 【Features】 ■ Quasi-monochromatic light ■ Wavelength 172nm ■ Instantaneous on/off ■ Irradiation during conveyor transport is possible ■ Reduced number of lamps, no auxiliary equipment required *For more details, please refer to the catalog or feel free to contact us.
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basic information
【Lineup】 ■ Small Excimer Irradiation Device QEV-150 ■ 6-Inch Excimer Irradiation Device QEV160 ■ 8-Inch Excimer Irradiation Device QEF230 ■ 12-Inch Excimer Irradiation Device QEV360 *For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ UV ozone cleaning ■ Dry etching / soft ashing ■ UV annealing ■ Surface modification ■ Resist residue removal ■ Glass bonding ■ Film formation such as light CVD, etc. *For more details, please refer to the catalog or feel free to contact us.
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Company information
Quark Technology Co., Ltd. manufactures and sells various industrial equipment using cutting-edge optical application technology. Through the development of vacuum ultraviolet and UV-LED light sources, we have introduced manufacturing technologies for semiconductors, new displays such as LCDs, PDPs, films, and EL, as well as various electronic materials and devices. Additionally, we are planning research and development to address the demand for waste and environmental management equipment, which are pressing medical and social issues. All matter is composed of atoms, nucleons, and "quarks." At Quark Technology, we continue to research light and challenge ourselves in industrial application technologies.
