It is possible to experimentally verify excimer cleaning surface modification using only a 100V power supply utility.
This device integrates an excimer irradiation unit with a main wavelength of 172 nm, a scanning stage, and an ozone decomposition device, allowing for easy and safe experiments on excimer surface modification using only a 100V power supply. **Features** The scanning stage enables processing of larger areas compared to conventional methods. The integrated ozone decomposition device eliminates the need for exhaust equipment.
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basic information
Model: ASM86 Excimer Emission Wavelength: 172nm Processing Target: W86mm×D120mm or smaller, thickness 40mm or less Irradiation Distance Adjustment: Equipped with adjustable lab jacks (variable irradiation distance from 0 to 40mm) External Dimensions: Main Unit: (W) 432mm × (D) 510mm × (H) 520.5mm Approximate Weight: About 25kg (Main Unit 20kg, Irradiation Unit 4.8kg) Main Unit Material: SUS304/A5052P/SPCC Irradiation Unit Lamp Manufacturer: Hamamatsu Photonics K.K. Model: FLAT EXCIMER EX-86U L13129 Irradiation Surface Size: 86mm × 40mm Recommended Effective Irradiation Distance for Excimer: Within 5mm Cooling Method: Forced Air Cooling Processing Speed: 0.1mm/sec to 120mm/sec Processing Movement Range: 240mm Touch Panel: 4-inch Monochrome Touch Panel Number of Recipes: 20 recipes (processing speed and irradiation time can be set) Monitoring Function: Displays current speed, current position, and remaining time Ozone Exhaust Equipment: Built-in ozone catalyst (fan forced exhaust) Utility: AC100V 50/60Hz 400VA
Price range
P2
Delivery Time
P1
Applications/Examples of results
Removal of organic films from glass surfaces Improvement of adhesion between glass and ITO Improvement of adhesion strength between ITO and insulating films Hydrophilization of various coating films Pre-treatment of packages Removal of organic films from wafer surfaces Removal of organic films from gold-plated surfaces and hydrophilization UV ashing of resist Removal of organic films from lens surfaces Hydrophilization of resin lens surfaces Improvement of adhesion with metal vapor-deposited films Pre-treatment for coating and lamination Pre-treatment for plating processes Removal of organic substances from resist film surfaces Improvement of adhesion with solder Cleaning of modules for nanoimprinting Pre-treatment before deposition of ceramic parts Improvement of adhesion for ceramic parts Improvement of adhesion between paint and resin substrates Improvement of adhesion between vapor-deposited films and resin substrates Improvement of adhesion between adhesives and resin substrates Improvement of adhesion between fabric and resin substrates
Company information
1) Dip Coating Business We provide a comprehensive dip coating system featuring ultra-low speed ranges, stable lifting speeds without speed variations, and an interface designed with user operability in mind. Based on previous examples of dip coating usage, we will collaborate with customers to consider appropriate coating conditions and offer new approaches. 2) UV Ozone Cleaning Equipment (UV Cleaner) We handle cleaning equipment utilizing a dry process with UV (ultraviolet) light. Our offerings range from small research units to production equipment, and we also provide devices for UV curing in addition to cleaning and modification.
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