Excimer irradiation device

Achieve damage-free cleaning and modification in a short time with high-energy excimer (VUV) light. Low-temperature treatment that minimizes thermal effects.

This product is a device that can chemically clean and modify the surfaces of materials such as glass, substrates, films, and sheets. It employs a mercury-free dielectric barrier discharge excitation lamp, which maintains a low lamp temperature during emission and allows for low-temperature processing due to its single wavelength of 172 nm, minimizing thermal effects. It can generate high concentrations of reactive oxygen species and various radicals in a short time, while simultaneously breaking the chemical bonds of organic substances on the substrate to promote oxidation, decomposition, and volatilization, enabling the removal of organic materials with high precision and in a short time while minimizing damage. Additionally, it allows for instant lighting at the required timing for processing, contributing to reduced environmental impact and lower running costs. 【Features】 ■ High photon energy ■ Single wavelength ■ Low-temperature irradiation ■ Instant lighting and flashing ■ Mercury-free *For more details, please download the PDF or feel free to contact us.

Ultraviolet irradiation equipment