A substrate inspection device that enables high-precision front-and-back separation.
The "Automatic Transport Type Transparent Substrate Inspection Device" is a surface inspection device for glass substrates and sapphire substrates developed by YGK (Yamanashi Technical Workshop). It is a dedicated machine for transparent glass substrates and is also compatible with various types of frosted back substrates. With an automatic sensor focusing mechanism, it enables high-precision front and back separation. The compatible substrate size is up to 200mm x 200mm. If you require sizes larger than 200mm, please consult us. 【Features】 ■ Automatic transport ■ High-precision front and back separation ■ High performance *For more details, please contact us or download the catalog.
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【Specifications】 ■ Supported board size: Maximum 200mm × 200mm (consultation required for sizes over 200mm) ■ Scanning method: X-Y scan / Θ-X scan (spiral scan) ■ Throughput: Approximately 4 minutes for 200mm / Approximately 3 minutes for 200mm (high-speed scanning available) ■ Workpiece placement: Transport robot (backside suction / edge clamp) ■ Device dimensions: W1,800mm × D1,230mm × H2,151mm ■ Main unit weight: Approximately 1,000kg ■ Power consumption: Approximately 1.5kW (100V) ■ Inspection target substrates: Quartz glass substrates, sapphire substrates, SiC substrates, SiC substrates with an epoxy film, etc. ■ Minimum detection sensitivity: 0.2μm for quartz glass substrates *For more details, please contact us or download the catalog.
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For more details, please contact us or download the catalog.
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We are a trading company that provides the sale of semiconductor manufacturing equipment, inspection equipment, and components for semiconductor manufacturing both domestically and internationally, as well as technical support and cost reduction in device manufacturing.