It is an analytical method made possible by excellent measurements!
"Secondary Ion Mass Spectrometry" is a method for compositional analysis of all elements containing hydrogen by mass analysis of secondary ions emitted when Cs or O2 ions in the range of several keV are irradiated onto a sample. It enables highly sensitive elemental analysis and excellent depth resolution measurements using low-energy ions. [Features] - Compositional analysis of all elements containing hydrogen - Elemental analysis is possible - Measurement of depth resolution using low-energy ions is possible *For more details, please refer to the catalog or feel free to contact us.
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【Application】 ■ Dopant profile evaluation ■ Thin film composition distribution evaluation ■ Surface and cross-sectional elemental distribution evaluation *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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The Ion Tech Center is a professional group that provides consulting and technical development support in "ion implantation," "physical analysis," and research and development. We aim to be a good partner for companies and university researchers as a creative laboratory equipped with cutting-edge technology and facilities that meet the demands of the times.