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  6. Small Gas Heater HX series

Small Gas Heater HX series

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HX

last updated:May 12, 2020

リンテック 東京営業所
リンテック 東京営業所
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It is a compact gas heater with low pressure loss and a clean structure.

This is a compact gas heater that can be heated up to Max 300℃ despite its low pressure loss structure. 【Features】 ○ Can be installed even after flow control by reducing pressure loss ○ Clean structure with all-metal seals ○ Gas contact material is SUS316L ○ Built-in thermal switch for abnormal heating detection ○ Built-in thermocouple ○ Capable of heating up to Max 300℃ while being compact in size *For other functions and details, please download the catalog.

    Vacuum EquipmentHeating device
HX.jpg

Small Gas Heater HX series

HX.jpg
HX.jpg
  • Related Link - http://www.lintec-mfc.co.jp/

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basic information

- Possible to install even after flow control by reducing pressure loss - Clean structure with all-metal seal - Gas contact material is SUS316L - Built-in thermal switch for abnormal heating detection - Built-in thermocouple - Compact size while capable of heating up to Max 300℃

Price range

P3

Delivery Time

P3

Applications/Examples of results

It is widely supplied to semiconductor, LCD, solar cell, and electronic component manufacturers, as well as their equipment manufacturers.

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Small Gas Heater HX series

Small Gas Heater HX series

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リンテック

リンテック 東京営業所

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Since its establishment in 1987, Lintec has developed and commercialized unique technologies related to fluid measurement and control, such as constant temperature differential control flow sensors, DLI liquid vaporization supply systems, and flow sensors for strong acids. These products are used not only in semiconductor manufacturing but also in various industries including automotive and medical.

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  • Heating device
          

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