Achieving a compact design! A deposition device equipped with four organic vapor deposition sources as standard.
The "KVD-OLED Evo.6" is a deposition device designed for organic EL materials intended for OPV (organic thin-film solar cells). The coating process of organic materials is conducted inside a connected glove box (MBRAUN), where substrates are transported into the deposition chamber using a transport mechanism to deposit electrodes, making it a consistent device. It can be connected to a glove box (MBRAUN Labmaster), and the load lock chamber can be operated manually. Exhaust operations can be controlled via the front touch panel (PLC). 【Features】 ■ Exhaust sequence can be controlled by PLC ■ Metal deposition includes both boat-type and crucible-type as standard ■ Thickness gauge is equipped with 3 sensors as standard ■ Metal deposition sources include both boat-type and crucible-type as standard ■ The deposition chamber is equipped with a maintenance-friendly protective plate as standard For more details, please refer to the catalog or feel free to contact us.
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basic information
【Specifications】 ■Board size (inches): 4 (MAX) ■Vacuum exhaust system (main exhaust): Cryopump (8 inches 1700L/s: N2) ■Vacuum exhaust system (auxiliary exhaust): Dry pump (500L/s: N2) ■Metal deposition source (boat type): 3 ■Metal deposition source (crucible type): 1 ■Organic deposition source (crucible type): 4 ■Heater mechanism (L chamber/D chamber): 1 each ■Glove box connection: Compatible with various manufacturers (※This device is manufactured by MBRAUN) ■Automatic processing: Possible ■Automatic transport: Possible ※For more details, please refer to the catalog or feel free to contact us.
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Applications/Examples of results
【Usage】 ■Coating of organic materials *For more details, please refer to the catalog or feel free to contact us.
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Company information
The history of Kitano Seiki is also a trajectory of continuous contribution to cutting-edge research fields through the provision of precision instruments for research and development. In November 1958, we were established as a company specializing in the design, manufacturing, and sales of precision instruments. Since then, we have developed and manufactured experimental equipment aimed at research institutes in universities and government agencies, as well as basic research laboratories in private companies, earning high praise for our excellent quality and reliability. In particular, in recent years, we have been at the forefront of ultra-high vacuum and ultra-low temperature technologies, which are essential in industrial fields such as new materials, nanotechnology, flat panel displays, high-temperature superconductivity, solar cells, nuclear power, and space development. We have accumulated abundant technology and know-how in creating experimental environments and have linked this to the development and provision of equipment that condenses advanced performance and functionality. At Kitano Seiki, we always work closely with researchers, our users, to design and develop equipment that accurately supports research and development objectives. With a consistent system from parts manufacturing to various processing, assembly, inspection and testing, equipment setup, and after-sales support, we provide high-quality products and a conducive experimental environment for quality research and development.