Fellow seal for multi-axis mechanism compatible with wafer transport robots in a vacuum environment.
The "Multi-Process Fellow Seal" is equipped with a multi-axis mechanism that supports wafer transport robots in a vacuum environment for various current semiconductor processes, and we also offer linear motion compatibility. Furthermore, we have products that can accommodate ultra-high vacuum processes of 10⁻⁶ Pa. 【Features】 [Coaxial 2-Axis Type] ■ A compact, lightweight type that achieves high vibration and rotational accuracy. [3-Axis Type] ■ A high-rigidity type that achieves high vibration and rotational accuracy. [Coaxial 3-Axis Linear Motion Type] ■ A high-rigidity type that achieves high vibration and rotational accuracy while maintaining a coaxial 3-axis structure. For more details, please refer to the catalog or feel free to contact us.
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basic information
【Lineup and Main Specifications】 [Coaxial 2-Axis Type] ■Vacuum Resistance Pa[Torr]: 10⁻⁶[10⁻⁸] ■Differential Pressure [kg/cm²]: 2.0 [3-Axis Type] ■Vacuum Resistance Pa[Torr]: 10⁻⁶[10⁻⁸] ■Differential Pressure [kg/cm²]: 2.0 [Coaxial 3-Axis Linear Motion Type] ■Vacuum Resistance Pa[Torr]: 10⁻⁶[10⁻⁸] ■Differential Pressure [kg/cm²]: 2.0 [Gas Purge Type] ■Vacuum Resistance Pa[Torr]: 10⁻⁶[10⁻⁸] ■Differential Pressure [kg/cm²]: 2.5 [Gas Circulation Type] ■Vacuum Resistance Pa[Torr]: 10⁻⁶[10⁻⁸] ■Differential Pressure [kg/cm²]: 3.5 (Gauge Pressure) [High Vacuum Type] ■Vacuum Resistance Pa[Torr]: 10⁻⁷[10⁻⁹] ■Differential Pressure [kg/cm²]: 2.5 *For more details, please refer to the catalog or feel free to contact us.
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Delivery Time
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Applications/Examples of results
【Usage Examples】 [Coaxial 2-Axis Type] ■ Wafer transport vacuum robot (scalar type) applications [3-Axis Type] ■ LCD large glass substrate transport vacuum robot (frog arm type) applications [Coaxial 3-Axis Linear Motion Type] ■ 300mm wafer transport or LCD large glass substrate transport vacuum robot applications [Gas Purge Type] ■ CVD equipment and furnace applications that generate corrosive gases and deposits [Gas Circulation Type] ■ Rotary gas union applications for tube manufacturing equipment [High Vacuum Type] ■ Ultra-high vacuum process compatible equipment applications *For more details, please refer to the catalog or feel free to contact us.
Company information
FerroTec Holdings Co., Ltd. is actively engaged in three business segments based on product applications and market fields: "Equipment-related business," "Solar cell-related business," and "Electronic device business." In the new energy and electronics industries, we propose high-quality products and services while providing cost-competitive products and services. Additionally, we prioritize activities that consider the global environment as one of our key management issues, progressively adapting to the latest environmental regulatory requirements, developing materials and products that can be utilized in the new energy industry, and contributing to the resolution of global environmental issues. FerroTec Holdings Co., Ltd. aims to contribute to society through manufacturing that leverages core technologies and to remain a company where stakeholders, including customers, shareholders, employees, business partners, and the local community, can enjoy growth.
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