Adopts a cartridge mechanism! A vacuum seal that can be combined with existing shafts.
At FerroTec Co., Ltd., we provide high-quality seals compatible with all types of vacuum processing equipment. The "Hollow Shaft Ferro Seal" features a cartridge mechanism that can be integrated with existing shafts. It is available in through-hole type, flange type, and cantilever type (compatible with active gases). Additionally, we offer a version without a clamp for fixing the shaft as an option. 【Features】 ■ The rotating shaft and the sleeve shaft of the cartridge are sealed statically by an O-ring. ■ The shaft and sleeve are fixed by a clamp. ■ Hermetic sealing is possible. ■ Prevents unmeasurable leaks. ■ Long life. For more details, please refer to the catalog or feel free to contact us.
Inquire About This Product
basic information
【Lineup and Main Specifications】 [Through Hole Type] ■ Shaft Diameter: 010, 020, 025, 030, 040, 050, 075 ■ Bearing Material: SUJ2 ■ Housing Material: SUS303 ■ Shaft Material: SUS630 [Flanged Type (Both Sides Bearing)] ■ Shaft Diameter: 010, 020, 025, 030, 040, 050, 075 ■ Bearing Material: SUJ2 ■ Housing Material: SUS303 ■ Shaft Material: SUS630 [Flanged Type (One Side Bearing)] ■ Shaft Diameter: 020, 025, 030, 040, 050 ■ Bearing Material: SUJ2 ■ Housing Material: SUS304 (SUS316 is optional) ■ Shaft Material: SUS630 *For more details, please refer to the catalog or feel free to contact us.
Price information
Please contact us.
Delivery Time
※Please contact us.
Applications/Examples of results
【Usage Examples】 ■ Sputtering, ion implantation, etc. ■ Rotary vacuum unions for electron, neutron, or ion injection, rotary targets ■ X-ray and optical equipment *For more details, please refer to the catalog or feel free to contact us.
Company information
FerroTec Holdings Co., Ltd. is actively engaged in three business segments based on product applications and market fields: "Equipment-related business," "Solar cell-related business," and "Electronic device business." In the new energy and electronics industries, we propose high-quality products and services while providing cost-competitive products and services. Additionally, we prioritize activities that consider the global environment as one of our key management issues, progressively adapting to the latest environmental regulatory requirements, developing materials and products that can be utilized in the new energy industry, and contributing to the resolution of global environmental issues. FerroTec Holdings Co., Ltd. aims to contribute to society through manufacturing that leverages core technologies and to remain a company where stakeholders, including customers, shareholders, employees, business partners, and the local community, can enjoy growth.
