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  5. Other inspection equipment and devices
  6. 10nm Feedback Stage Controller FC-511

10nm Feedback Stage Controller FC-511

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FC-511

last updated:Jun 03, 2019

シグマ光機
シグマ光機
  • Official site

Positioning control with 10nm resolution! Improving reproducibility in inspections and research!

It can be used as a 10nm resolution positioning device in combination with a 10nm feedback stage. Feedback (full closed-loop) control is performed based on position information from the linear encoder built into the stage, resulting in high resolution and excellent reproducibility. Communication control via commands from external devices is possible, allowing it to be used as part of a measurement system.

    Other inspection equipment and devicesOther microscopesOther FA equipment
fc511_image.jpg

10nm Feedback Stage Controller FC-511

fc511_image.jpg
fc511_image.jpg
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

Model: FC-511 Compatible Stages: FS-10□0PX series, FS-1100PX, FS-3150PX, FS-1005PZ, FS-1010PZ, FS-10□0PX(V) series, FS-1100PX(V), FS-1005PZ(V), FS-1010PZ(V) Number of Control Axes: 2 Minimum Command Unit: 10nm In-Position Range: ±10nm (±30nm, ±70nm selectable) Maximum Operating Speed Setting: 50mm/sec (dependent on the performance of the connected stage) Control Interface: Emergency stop input, GP-IB, USB, Ethernet, General I/O Teaching Function: 200 lines × 5 channels (1 command per line) Power Supply: AC100V–240V

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P4

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Applications/Examples of results

Positioning applications for advanced research, etc. Positioning of optical systems Positioning during the evaluation of microdevices

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Model number overview
FC-511 Successor to the FC-501A
FC-514 FC-511 with a slowdown feature

catalog(3)

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FS-3150PX Catalog

FS-3150PX Catalog

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10nm Feedback Stage System Catalog

10nm Feedback Stage System Catalog

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Vacuum-Compatible 10nm Feedback Stage System Catalog

Vacuum-Compatible 10nm Feedback Stage System Catalog

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Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

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The related categories of Other inspection equipment and devices

  • Measurement and Analysis
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