If the pressure is the same, the water usage is 1/3; if the flow rate is the same, the pressure is 3 times; with a lower flow rate, there are repeated impacts. For removing slurry after mask and glass cleaning wafer polishing.
A cleaning nozzle unit that requires less water and is less likely to form a water film, which can be retrofitted to existing equipment. A cleaning nozzle that operates at a maximum of 30Hz. A pump that generates high-pressure water of 5 to 10 MPa. A combination of control units. Conventional continuous spraying applies pressure over a self-created water film, which tends to increase cleaning power = increase pressure = increase flow rate, resulting in a thicker water film. However, the DP-Gun uses intermittent spraying, which means that even at the same pressure (impact), the flow rate is lower, making it less likely to form a water film, and the sprayed water directly impacts the target object. By repeatedly applying intermittent spray impacts, it demonstrates excellent cleaning effects for removing foreign substances from the items being cleaned, cleaning masks, and cleaning three-dimensional objects (such as narrow grooves and complex shapes) like cassettes. The pump unit achieves stable water pressure control with minimal waste water during pressure adjustment by performing feedback control that matches flow rate changes due to nozzle opening and closing. *Please consult us regarding spraying a fixed amount of liquid and measurement + spray application. *Nozzles and pumps require regular maintenance.
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basic information
【Reference Specifications】 ■DP-Gun 1 unit ・ Main unit ・ Nozzle tip with standard cleaning width of approximately 110mm or approximately 65mm *1 ■Pump Unit 1 set ・ Pump *1 ・ Control unit (built-in driver for 2 DP-Guns) ・ Operation panel ・ External control compatible (start, stop, alarm output, etc.) ■Setting Items 1. Pressure (supply pressure 2–10MPa) 2. Frequency (spray frequency 5–30Hz) 3. Pulse width (spray opening time 5–15ms) *1 The shape of the nozzle tip and pump capacity will be discussed separately based on the cleaning purpose, required flow rate, and the number of DP-Guns to be installed. ■Others We can propose solutions according to your needs, including DP-Gun mounting brackets, cleaning tanks, moving stages, drying with spin air knives, and integration with other cleaning methods (ultrasonic, chemical solutions, etc.). * The photo shows an image of multiple DP-Guns connected and our demo unit (with mounting bracket and simple cleaning tank).
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Applications/Examples of results
【Applications】 ■ Cleaning various masks - Used as a roller transport device - Standalone use (handgun method) ■ Cleaning chip trays - High-pressure pulse jet → US cleaning → Oven drying ■ Cleaning device using roller transport for seed glass - Brush → High-pressure pulse jet → Rinse → Air knife drying ■ Cleaning of three-dimensional objects such as cassettes, carriers, carrier cassettes, and chip trays for wafers - Cleaning inner and outer surfaces in combination with a multi-joint robot (automating manual work) ■ Strengthening the cleaning power of existing lines - Addition to part of the cleaning tank of existing cleaning devices - Replacement of existing cleaning devices' two-fluid spray
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At Technical Fit Co., Ltd., we propose various cleaning devices, particle and spacer dispersion devices, static electricity removal devices, and inspection devices tailored to our customers' needs and budgets. Please feel free to consult us regardless of the industry, including LCD, semiconductors, automotive, food, and medical fields.
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