Stage with built-in linear encoder for positioning with 1nm resolution, maximum movable range of 50mm, usable within a vacuum chamber.
A super-precise positioning device (feedback stage system) has achieved a resolution of 1nm and a reproducibility of ±2nm with respect to optical linear encoders. It can be used in a vacuum chamber with a vacuum level of 10^-4 Pa. Compared to positioning devices that utilize piezo technology, it is utilized in a wide range of applications due to its "low cost," "easy control," and "large stroke capabilities." The available strokes are "20mm," "40mm," and "50mm." If you are facing challenges with positioning, please feel free to contact us. ■ For more details, please download the catalog or contact us.
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basic information
■Stage Minimum resolution: 1nm (relative to the reading value of the built-in scale) Stroke: 20mm to 50mm Maximum movement speed: 2mm/sec Compatible vacuum level: 10^-4 Pa ■Controller Number of control axes: 2 Minimum command unit: 1nm Maximum operating speed setting: 6mm/sec (the maximum movement speed of the stage takes priority) Control interface: Jog controller, emergency stop input, GP-IB, USB, Ethernet, general-purpose I/O
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Applications/Examples of results
Various fields requiring precise positioning. Research fields utilizing X-rays. Semiconductor field.
Line up（4）
| Model number | overview |
|---|---|
| FS-1050UPX(V) | 1nm resolution (internal scale reading value), vacuum-compatible stage with 50mm stroke |
| FS-1040UPX(V) | 1nm resolution (internal scale reading value), vacuum-compatible stage with 40mm stroke |
| FS-1020UPX(V) | 1nm resolution (internal scale reading value), vacuum-compatible stage with 20mm stroke |
| FC-911 | Controller for 1nm resolution stage |
catalog（4）
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Company information
The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.
