High vacuum compatible! Highly compatible positioning table.
This product is a vacuum-compatible positioning table. Since our company conducts outgassing evaluations in-house, we can provide vacuum applications with specifications that accurately meet customer requirements. Additionally, the VT series has high compatibility and size variations equivalent to commercially available stages (for atmospheric use) from various manufacturers, allowing you to convert your existing atmospheric specification equipment to low outgassing specifications or make it vacuum-compatible without design changes. 【Features】 ■ Compatible with high vacuum (approximately 1×10^-5 Pa) ■ Uses vacuum-compatible stepping motors ■ Uses vacuum-compatible photo sensors ■ Vacuum-compatible grease can be selected optimally according to the customer's application *For more details, please refer to the catalog or feel free to contact us.
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basic information
【Main Specifications】 ■External dimensions: W188×L188×H38[mm] ■Table size: 125×125[mm] ■Movement: 25[mm] in both XY axes ■Drive: 5-phase stepping motor ■Guide: Cross roller guide ■Weight: 3.0［kg］ ■Main material: Aluminum alloy ■Surface treatment: Special Ni plating ■Load capacity: 2.0[kg] ■Repeat positioning accuracy: ±50[μm] ■Yawing and pitching: 30[arcsec] *For more details, please refer to the catalog or feel free to contact us.
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For more details, please refer to the catalog or feel free to contact us.
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Our company is committed to 'monozukuri' (manufacturing), nurturing and enhancing our technical capabilities. We utilize this to connect companies with specialized fields and strengths, aiming to create new innovations.