Vacuum-compatible positioning table <MT>

basic information

This is a compact positioning stage compatible with a vacuum level of 5×10^-5 Pa. 【Features】 - Equipped with a vacuum-compatible stepping motor (in-house manufactured) - Equipped with a vacuum-compatible photo sensor (in-house manufactured) - Designation of vacuum grease brand is possible; non-grease options are also available - Utilizes cross roller guides in the guiding system to achieve high rigidity and high precision, ensuring stable movement - Options such as brackets that can be combined in multi-axis configurations like XY, XYZ, and θ axes are available - Can be used in environments other than vacuum, such as high-temperature environments or environments that are sensitive to outgassing - There are models that meet clean specifications equivalent to JIS Clean Class 4 with the same performance [Specifications] External dimensions: W26 × L110 × H36 [mm] Stroke: 10 [mm] *Other lineups are available ⇒ For more details, please inquire via download. ⇒ For inquiries regarding vacuum-compatible products, estimates, etc., please contact us through the comments below.

Price range

P3

Delivery Time

Applications/Examples of results

For more details, please inquire through a request for materials or download.