メガトラスト Product Lineup

This product is a positioning table compatible with high vacuum (approximately 1×10^-5 Pa). It can be used in narrow and confined spaces with a minimum thickness of 25 mm for strokes up to 200 mm. Additionally, since our company conducts its own outgassing evaluation, there is minimal impact on other equipment within the chamber when used in a high vacuum environment, allowing us to provide precise specifications for vacuum applications. 【Features】 ■ Equipped with vacuum-compatible stepping motors ■ Equipped with vacuum-compatible photo sensors ■ Ideal for multiple installations, such as side-by-side arrangements *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment

This product is a positioning table compatible with high vacuum (approximately 1×10-5 Pa). Despite its ultra-compact body that fits in the palm of your hand, it achieves high rigidity by employing cross roller guides in the guidance system and precision ball screws (preloaded) in the transmission system, ensuring stable movement. Additionally, we offer options such as brackets that can be combined in multi-axis configurations like XY and XZ axes. 【Features】 ■ Clean-compatible products are also available ■ Compact & high rigidity ■ Uses vacuum-compatible stepping motors ■ Uses vacuum-compatible photo sensors ■ Vacuum-compatible grease is selected based on the customer's application *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment

This product is a micro linear actuator designed for vacuum environments (approximately 1×10^-4 Pa) with low outgassing specifications. It is driven by a stepping motor, allowing for simple positioning through pulses, and is ultra-compact, smaller than a ballpoint pen or AA battery. Additionally, since we conduct our own outgassing evaluations, it has minimal impact on other equipment within the chamber even when used in high vacuum environments, enabling us to provide precise specifications for vacuum applications. [Applications] ■ Replacement for manual operations - Areas where electrification was not possible due to spatial constraints - Hard-to-reach areas that require adjustment ■ Driving new compact applications - Custom manufacturing based on specifications is also possible, etc. *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment

This product is compatible with single-pole (coaxial) feedthroughs. We offer general input terminals [BNC type], high voltage compatible [SHV type], and compact [LEMO type]. Since we conduct gas emission evaluations in-house, we can provide precise specifications for vacuum applications. [Features] ■ Compatible with single-pole (coaxial) feedthroughs ■ Provides precise specifications for vacuum applications *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment

This product is an MS round hermetic type compatible with multipole feedthroughs. The "O-ring type" is standard, but we can also accommodate a "welded type" that can be welded to the desired flange. Since we conduct gas emission evaluations in-house, we can provide accurate specifications for vacuum applications. 【Features】 ■ Compatible with multipole feedthroughs ■ Provides accurate specifications for vacuum applications *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment

The product is a D-SUB type hermetic that supports multipole feedthrough. We offer both "O-ring type" and "weld type" that can be welded to your desired flange, even though they are the same D-SUB type. Since we conduct gas emission evaluations in-house, we can provide accurate specifications for vacuum applications. 【Features】 ■ Supports multipole feedthrough ■ Provides accurate specifications for vacuum applications *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment

This product uses an ultrasonic motor (USM) as the drive source and is compatible with vacuum non-magnetic environments. Our company conducts gas emission evaluations and magnetic field measurements in-house, allowing us to provide precise specifications for vacuum non-magnetic applications tailored to customer requirements. In addition to a freely combinable axis configuration for each operating unit, we offer products with excellent cost performance through model differentiation based on environmental conditions and accuracy grades. [Features] - Utilizes an ultrasonic motor (USM) as the drive source - Compatible with vacuum non-magnetic environments - Custom specifications for vacuum non-magnetic products based on customer requirements *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment

This product is a vacuum-compatible positioning table. Since our company conducts outgassing evaluations in-house, we can provide vacuum applications with specifications that accurately meet customer requirements. Additionally, the VT series has high compatibility and size variations equivalent to commercially available stages (for atmospheric use) from various manufacturers, allowing you to convert your existing atmospheric specification equipment to low outgassing specifications or make it vacuum-compatible without design changes. 【Features】 ■ Compatible with high vacuum (approximately 1×10^-5 Pa) ■ Uses vacuum-compatible stepping motors ■ Uses vacuum-compatible photo sensors ■ Vacuum-compatible grease can be selected optimally according to the customer's application *For more details, please refer to the catalog or feel free to contact us.

• Vacuum Equipment
• Other measurement and measuring equipment

Our company conducts its own gas emission evaluations, allowing us to provide accurate specifications for vacuum applications.

• Electron beam lithography equipment
• Other semiconductor manufacturing equipment
• Analytical Equipment and Devices

Our company conducts evaluations of gas emissions and magnetic field measurements in-house, allowing us to provide accurate specifications for vacuum and non-magnetic applications.

• Electron beam lithography equipment
• Other semiconductor manufacturing equipment
• Analytical Equipment and Devices

Our company conducts its own evaluation of released gases, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.

• Other semiconductor manufacturing equipment
• Other physicochemical equipment
• Analytical Equipment and Devices

Our company conducts its own gas emission evaluations, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.

• Other semiconductor manufacturing equipment
• Other physicochemical equipment
• Analytical Equipment and Devices

Our company conducts its own gas emission evaluations, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.

• Other semiconductor manufacturing equipment
• Other physicochemical equipment
• Analytical Equipment and Devices

Our company conducts its own evaluation of released gases, so even when used in a high vacuum environment, there is minimal impact on other equipment within the chamber, allowing us to provide accurate specifications for vacuum applications.

• Other semiconductor manufacturing equipment
• Other physicochemical equipment
• Analytical Equipment and Devices